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Space resolved optical emission spectroscopy during deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films by double hollow cathode plasma Jet system

  1. 1.
    SYSNO0326764
    TitleSpace resolved optical emission spectroscopy during deposition of BaxSr1-xTiO3 thin films by double hollow cathode plasma Jet system
    TitleProstorově rozlišená optická emisní spektroskopie během depozice tenkých vrstev BaxSr1-xTiO3 pomocí dvojtryskového plazma-jet systému
    Author(s) Olejníček, Jiří (FZU-D) RID, ORCID
    Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
    Čada, Martin (FZU-D) RID, ORCID, SAI
    Virostko, Petr (FZU-D)
    Kment, Štěpán (FZU-D) RID, ORCID
    Adámek, Petr (FZU-D) RID, ORCID
    Jastrabík, Lubomír (FZU-D) RID, ORCID
    Dejneka, Alexandr (FZU-D) RID, ORCID
    Source Title Materials Science Forum. Roč. 609, - (2009), s. 105-109
    Conference International Conference on Thin Films and Porous Materials /1./, Algiers, 19.05.2008-22.05.2008
    Document TypeČlánek v odborném periodiku
    Grant GA202/08/1009 GA ČR - Czech Science Foundation (CSF)
    KJB100100707 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    CEZAV0Z10100522 - FZU-D (2005-2011)
    Languageeng
    CountryCH
    Keywords BaxSr1-xTiO3 * BSTO * ferroelectric films * hollow cathode * optical emission spectroscopy
    Permanent Linkhttp://hdl.handle.net/11104/0173768
     
Number of the records: 1  

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