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Deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films by double RF hollow cathode plasma jet system

  1. 1.
    SYSNO0319065
    TitleDeposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system
    TitleDepozice tenkých vrstev BaxSr1-xTiO3 pomocí systému dvou vysokofrekvenčních plazmových trysek s efektem duté katody
    Author(s) Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
    Virostko, Petr (FZU-D)
    Tichý, M. (CZ)
    Čada, Martin (FZU-D) RID, ORCID, SAI
    Adámek, Petr (FZU-D) RID, ORCID
    Olejníček, Jiří (FZU-D) RID, ORCID
    Deyneka, Alexander (FZU-D)
    Churpita, Olexandr (FZU-D) RID, ORCID
    Valvoda, V. (CZ)
    Jastrabík, Lubomír (FZU-D) RID, ORCID
    Source Title Contributions to Plasma Physics. Roč. 48, 5-7 (2008), s. 515-520
    Document TypeČlánek v odborném periodiku
    Grant KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    KJB100100707 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    1QS100100563 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    GA202/06/0776 GA ČR - Czech Science Foundation (CSF)
    CEZAV0Z10100522 - FZU-D (2005-2011)
    Languageeng
    CountryDE
    Keywords BSTO * ferroelectric films * hollow cathode * Langmuir probe * optical emission spectroscopy * plasma jet
    Permanent Linkhttp://hdl.handle.net/11104/0168325
     
Number of the records: 1