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Digital control of beams position in high-resolution interferometer for calibration of precise length sensors
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SYSNO 0316646 Title Digital control of beams position in high-resolution interferometer for calibration of precise length sensors Title Číslicové řízení polohy svazků v interferometru s vysokým rozlišením pro kalibrace přesných délkových senzorů Author(s) Číp, Ondřej (UPT-D) RID, SAI, ORCID
Šmíd, Radek (UPT-D) RID, SAI
Buchta, Zdeněk (UPT-D) RID, SAI, ORCID
Čížek, Martin (UPT-D) RID, ORCID, SAI
Lazar, Josef (UPT-D) RID, ORCID, SAISource Title NanoScale 2008 - 8th Seminar on Quantitative Microscopy (QM) and 4th Seminar on Nanoscale Calibration Standards and Methods. S. 44. - Torino : Istituto Nazionale di Ricerca Metrologica, 2008 Conference NanoScale 2008, Torino, 22.09.2008-23.09.2008 Document Type Abstrakt Grant IAA200650504 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic 2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA102/07/1179 GA ČR - Czech Science Foundation (CSF) 2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO) 2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO) FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO) CEZ AV0Z20650511 - UPT-D (2005-2011) Language eng Country IT Keywords high resolution interferometry * nanometrology Permanent Link http://hdl.handle.net/11104/0166504
Number of the records: 1