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SLEEM Imaging of Doping Patterns in Semiconductors
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SYSNO 0205406 Title SLEEM Imaging of Doping Patterns in Semiconductors Author(s) Müllerová, Ilona (UPT-D) RID, SAI, ORCID
Frank, Luděk (UPT-D) RID, SAI, ORCID
El Gomati, M. M. (GB)Source Title Proceedings of 5th Multinational Congress on Electron Microscopy. s. 317-318. - Lecce : Rinton Press, 2001 / Dini L. ; Catalano M. Conference MCEM '01 /5./ - Multinational Congress on Electron Microscopy, Lecce, 20.09.2001-25.09.2001 Document Type Konferenční příspěvek (zahraniční konf.) Grant IAA1065901 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z2065902 - UPT-D Language eng Country IT Keywords UHV SEM * low energy range Permanent Link http://hdl.handle.net/11104/0101020
Number of the records: 1