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The interaction of the supersonic plasma - jet with substrate in the RF plasma-chemical reactor

  1. 1.
    SYSNO0131012
    TitleThe interaction of the supersonic plasma - jet with substrate in the RF plasma-chemical reactor
    Author(s) Šícha, M. (CZ)
    Hubička, Z. (CZ)
    Tichý, M. (CZ)
    Novák, Miloš (FZU-D)
    Soukup, Ladislav (FZU-D)
    Jastrabík, Lubomír (FZU-D) RID, ORCID
    Behnke, J. F. (DE)
    Kapička, V. (CZ)
    Kapoun, K. (CZ)
    Šerý, M. (CZ)
    Source Title Contributions to Plasma Physics. Roč. 36, č. 5 (1996), s. 605-611. - : Wiley
    Document TypeČlánek v odborném periodiku
    Grant 0659 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    Languageeng
    CountryDE
    Permanent Linkhttp://hdl.handle.net/11104/0029107
     

Number of the records: 1  

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