Number of the records: 1  

Plasma Polymers and Related Materials

  1. 1.
    SYSNO0032087
    TitleTreatment of Organosilicon Thin Films by Exposure to Different O2 Based Plasma and Afterglow Conditions
    TitlePlazmové leptání organokřemíkových tenkých vrstev modifikovaných za různých podmínek aktivního a rozpadajícího se plazmatu
    Author(s) Supiot, P. (FR)
    Macková, Anna (UJF-V) RID, ORCID, SAI
    Vivien, C. (FR)
    Granier, A. (FR)
    Bousquet, CH. (FR)
    Boufayed, F. (FR)
    Escaich, D. (FR)
    Raynoad, P. (FR)
    Strýhal, Z. (CZ)
    Pavlík, Josef (ENTU-I)
    Source Title Plasma Polymers and Related Materials, Thin Films by Exposure to Different O2 Based Plasma and Afterglow Conditions. s. 53-58. - Ankara : Hacettepe University Press, 2005
    ISBN975-491-194-0
    Document TypeČást monografie, knihy (kapitola)
    Grant OC 527.100 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    1P05OC014 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    CEZAV0Z10480505 - UJF-V (2005-2011)
    Languageeng
    CountryTR
    Keywords organosilicon * PACVD * PECVD * RBS analysis
    Permanent Linkhttp://hdl.handle.net/11104/0132691
     
Number of the records: 1  

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