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RF Hollow Cathode Plasma Jet Deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. Films
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SYSNO 0027161 Title RF Hollow Cathode Plasma Jet Deposition of BaxSr1-xTiO3 Films Title Depozice vrstev BaxSr1-xTiO3 pomocí RF plasmové trysky Author(s) Ianno, N.J. (US)
Soukup, R. J. (US)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Olejníček, Jiří (FZU-D) RID, ORCID
Šíchová, Hana (FZU-D)Source Title Materials, Integration and Technology for Monolithic Instruments. D2.4.1-D2.4.6. - Pittsburgh : Warendale, PA, 2005 / Theil A.J. ; Bohm M. ; Gardner S.D. ; Blalock T. Conference MRS Spring Meeting, San Francisco, 28.03.2005-01.04.2005 Document Type Konferenční příspěvek (zahraniční konf.) Grant KJB1010302 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR), CZ - Czech Republic Language eng Country US Keywords BSTO thin films * hollow cathode * emission spectroscopy Permanent Link http://hdl.handle.net/11104/0117285
Number of the records: 1