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Plasma polymer films rf sputtered from PTFE under various argon pressures
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SYSNO 0026589 Title Plasma polymer films rf sputtered from PTFE under various argon pressures Title Plasmaticky nanášené vrstvy PTFE při různém tlaku argonu Author(s) Stelmashuk, Vitaliy (UFP-V) RID
Biederman, H. (CZ)
Slavinská, D. (CZ)
Zemek, Josef (FZU-D) RID, ORCID
Trchová, Miroslava (UMCH-V) RID, ORCIDSource Title Vacuum. Roč. 77, č. 2 (2005), s. 131-137. - : Elsevier Document Type Článek v odborném periodiku Grant OC 527.10 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic OC 527.90 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic OE57, XE - EU countries CEZ AV0Z10100521 - FZU-D (2005-2011) AV0Z20430508 - UFP-V (2005-2011) Language eng Country GB Keywords RF sputtering * PTFE * fluorcarbon plasma polymers * thin film * teflon * deposition Permanent Link http://hdl.handle.net/11104/0116815
Number of the records: 1