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Plasma polymer films rf sputtered from PTFE under various argon pressures

  1. 1.
    SYSNO0026589
    TitlePlasma polymer films rf sputtered from PTFE under various argon pressures
    TitlePlasmaticky nanášené vrstvy PTFE při různém tlaku argonu
    Author(s) Stelmashuk, Vitaliy (UFP-V) RID
    Biederman, H. (CZ)
    Slavinská, D. (CZ)
    Zemek, Josef (FZU-D) RID, ORCID
    Trchová, Miroslava (UMCH-V) RID, ORCID
    Source Title Vacuum. Roč. 77, č. 2 (2005), s. 131-137. - : Elsevier
    Document TypeČlánek v odborném periodiku
    GrantOC 527.10 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    OC 527.90 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    OE57, XE - EU countries
    CEZAV0Z10100521 - FZU-D (2005-2011)
    AV0Z20430508 - UFP-V (2005-2011)
    Languageeng
    CountryGB
    Keywords RF sputtering * PTFE * fluorcarbon plasma polymers * thin film * teflon * deposition
    Permanent Linkhttp://hdl.handle.net/11104/0116815
     
Number of the records: 1  

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