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Some mechanical properties of DLC and CN.sub.x./sub. coatings deposited by reactive sputtering or plasma-chemical techniques

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    SYSNO0024671
    TitleSome mechanical properties of DLC and CNx coatings deposited by reactive sputtering or plasma-chemical techniques
    TitleNěkteré mechanické vlastnosti povlaků DLC a CNx deponovaných reaktivním naprašováním a plasmo-chemickými metodami
    Author(s) Boháč, Petr (FZU-D) RID, ORCID
    Kulikovsky, V. Y. (UA)
    Šícha, M. (CZ)
    Source TitleProceedings of the COST 516 Tribology Symposium /3./. s. 117-125. - Eibar : Fundatión TEKNIKER, 2000 / Igartua A. ; Alberdi A.
    Conference COST 516 Tribology Symposium, Eibar, 15.05.2000-19.05.2000
    Document TypeKonferenční příspěvek (zahraniční konf.)
    Grant OC 516.50 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    CEZAV0Z1010914 - FZU-D
    Languageeng
    CountryES
    Keywords amorphous films a-C, a-C:H, Ti-C:H, and CNx * mechanical and tribological properties * intrinsic stress evolution * adhesion
    Permanent Linkhttp://hdl.handle.net/11104/0115175
     
Number of the records: 1  

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