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Preparation of Ni-Mn-Ga Micropillars Using Focused Xe-ion Beam Milling for Magnetic Actuation on Microscale
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SYSNO ASEP 0496285 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Preparation of Ni-Mn-Ga Micropillars Using Focused Xe-ion Beam Milling for Magnetic Actuation on Microscale Author(s) Straka, Ladislav (FZU-D) ORCID
Klimša, Ladislav (FZU-D) ORCID
Kopeček, Jaromír (FZU-D) RID, ORCID
Heczko, Oleg (FZU-D) RID, ORCID
Musiienko, D. (FI)
Ullakko, K. (FI)Number of authors 6 Source Title Proceedings International Conference on New Actuators /16./. - Bremen : VDE VERLAG, 2018 / Borgmann H. - ISBN 978-3933339300 Pages s. 1-642 Number of pages 4 s. Publication form Online - E Action ACTUATOR 2018 - International Conference on New Actuators /16./ Event date 25.06.2018 - 27.06.2018 VEvent location Bremen Country DE - Germany Event type WRD Language eng - English Country DE - Germany Keywords Micropillars ; Actuation Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) Institutional support FZU-D - RVO:68378271 Annotation Magnetic shape memory alloys are promising candidates for actuation on microscale. We investigate the possibility of using focused Xe-ion (as an alternative to Ga-ion) beam milling (Xe-FIB) for microfabrication on Ni-Mn-Ga magnetic shape memory single crystals. We started with the most basic structures such as micropillars. Xe-FIB working conditions of 30 kV/100 nA results in large curtaining effect thus for micrometre sized structures a two-step milling procedure was used with the final polishing conditions of 30 kV/100 pA. Pillars down to 1 micrometre size were produced preparation of 10 x 10 micrometres square-base pillar for magnetomechanical testing is illustrated in individual steps. By the combination of mechanical testing and optical microscopy we demonstrate that the Xe-FIB milling does not significantly change the ability of martensite twin boundaries to propagate through the fabricated pillars. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2019
Number of the records: 1