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The hydrogen plasma doping of nanocrystalline ZnO thin flms
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SYSNO ASEP 0483629 Document Type A - Abstract R&D Document Type O - Ostatní Title The hydrogen plasma doping of nanocrystalline ZnO thin flms Author(s) Chang, Yu-Ying (FZU-D)
Remeš, Zdeněk (FZU-D) RID, ORCID
Stuchlík, Jiří (FZU-D) RID, ORCIDNumber of authors 3 Source Title E-MRS 2017 Spring Meeting and Exhibit. - Strasbourg : European Materials Research Society, 2017 Number of pages 1 s. Publication form Online - E Action E-MRS 2017 Spring Meeting and Exhibit Event date 22.05.2017 - 26.05.2017 VEvent location Strasbourg Country FR - France Event type WRD Language eng - English Country FR - France Keywords ZnO ; magnetron sputtering ; hydrogen ; doping Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) R&D Projects GC16-10429J GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 Annotation We study the effect on the optical and electrical properties of hydrogen plasma treatment of the nominally undoped, nanocrystalline ZnO thin films deposited by DC reactive magnetron sputtering of Zn target in the gas mixture of argon and oxygen plasma. After hydrogen plasma treatment, the increase of the electrical conductivity and the increase of the infrared optical absorption was detected and related to the increase of the free carrier concentration. To confirm this relation, the mobility and carrier concentration were measured by temperature dependent electrical resistivity and Hall effect using the van der Pauw method. We also investigated the localized defect states below the optical absorption edge using optical absorption spectroscopy and photoluminescence in a broad spectral range from near UV to near IR. We conclude that the increase of the electrical conductivity is indeed confirmed to be related to the increase of the free carrier concentration. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2018
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