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Image analysis algorithm for the verification of hexagonal symmetry in spherical nanostructures
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SYSNO ASEP 0556001 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Image analysis algorithm for the verification of hexagonal symmetry in spherical nanostructures Author(s) Domonkos, M. (CZ)
Jackivová, Rajisa (FZU-D)
Pathó, A. (CZ)Number of authors 3 Article number 111635 Source Title Microelectronic Engineering. - : Elsevier - ISSN 0167-9317
Roč. 251, Jan (2022)Number of pages 10 s. Language eng - English Country NL - Netherlands Keywords image analysis ; nanosphere lithography ; defect detection ; hexagonal ordering ; scanning electron microscopy ; Python Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Electrical and electronic engineering Research Infrastructure CzechNanoLab - 90110 - Vysoké učení technické v Brně Method of publishing Limited access Institutional support FZU-D - RVO:68378271 UT WOS 000710177300002 EID SCOPUS 85118727388 DOI 10.1016/j.mee.2021.111635 Annotation Verification of ordering and symmetry is essential to enhance the nanofabrication process of periodic nano-structures. In this paper, we present the open-source software HEXI, which can detect circles and distinguish between perfect hexagonal ordering and defect configurations. The proposed user-friendly image analysis soft-ware (implemented in Python) consists of several stages. First, the algorithm identifies circular structures in microscopy (e.g., scanning electron microscopy, atomic force microscopy) images using the Canny edge detector and the Hough circle transform. Then, the detected circles are categorized as hexagonally ordered or non- hexagonally ordered (defects). This classification can be achieved using three different methods: variance in brightness (global or adaptive) and distance. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2023 Electronic address https://doi.org/10.1016/j.mee.2021.111635
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