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Energetic Au ion beam implantation of ZnO nanopillars for optical response modulation
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SYSNO ASEP 0554886 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Energetic Au ion beam implantation of ZnO nanopillars for optical response modulation Author(s) Macková, Anna (UJF-V) RID, ORCID, SAI
Malinský, Petr (UJF-V) RID, ORCID, SAI
Jagerová, Adéla (UJF-V) ORCID, SAI
Mikšová, Romana (UJF-V) RID, ORCID, SAI
Lalik, Ondřej (UJF-V) SAI
Nekvindová, P. (CZ)
Mistrík, J. (CZ)
Marvan, P. (CZ)
Sofer, Z. (CZ)
Holý, V. (CZ)
Schutter, J. D. (DE)
Kentsch, U. (DE)
Azarov, A. (NO)
Galeckas, A. (NO)Number of authors 14 Article number 215101 Source Title Journal of Physics D-Applied Physics. - : Institute of Physics Publishing - ISSN 0022-3727
Roč. 55, č. 21 (2022)Number of pages 14 s. Publication form Print - P Language eng - English Country GB - United Kingdom Keywords ZnO nanopillars ; Au nanoparticles ; ion implantation ; SPR ; doped ZnO nanostructures OECD category Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect) R&D Projects EF16_013/0001812 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA18-03346S GA ČR - Czech Science Foundation (CSF) Research Infrastructure CEMNAT II - 90103 - Univerzita Pardubice Method of publishing Limited access Institutional support UJF-V - RVO:61389005 UT WOS 000760506400001 EID SCOPUS 85126040598 DOI 10.1088/1361-6463/ac5486 Annotation Nanopillars of ZnO were implanted with Au-400 keV ions at various ion fluences from 1 x 10(15) cm(-2) to 1 x 10(16) cm(-2) and subsequently annealed at 750 degrees C for 15 min in order to reduce the implantation damage and to support Au nanoparticle (NP) aggregation. It was found that implantation-induced effects and thermal effects influence the Au NP coalescence as well as the quality of the ZnO nanopillars. Rutherford Back-Scattering spectrometry (RBS) showed the broader Au-depth profiles than it was theoretically predicted, but the Au-concentration maximum agrees well with prediction taking into account the effective ZnO layer density. The implantation at the higher fluences induced the morphology modification of the nanopillar layer evidenced by RBS and scanning electron microscopy (SEM). An indirect evidence of this effect was given by optical ellipsometry due to gradual refractive index changes in the ZnO nanopillars with the increased Au-ion fluence. Optical characterization of the Au-implanted and annealed nanopillars performed by means of photoluminescence (PL) and diffuse-reflectance spectroscopy (DRS) evidenced the surface plasmon resonance (SPR) activity of the embedded Au NPs. The SPR-enhanced scattering and PL emission observed in the spectral range 500-650 nm are ascribed to Au NPs or more complex Au-clusters. In addition, the ellipsometry measurements of extinction coefficient are found to corroborate well results from DRS, both indicating increase of SPR effect with the increase of Au-ion fluence and after the post-annealing. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2023 Electronic address https://doi.org/10.1088/1361-6463/ac5486
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