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Surface stoichiometry and depth profile of Ti.sub.x./sub.-Cu.sub.y./sub.N.sub.z./sub. thin films deposited by magnetron sputtering
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SYSNO ASEP 0552187 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Surface stoichiometry and depth profile of Tix-CuyNz thin films deposited by magnetron sputtering Author(s) Mukhopadhyay, A.K. (IN)
Roy, A. (IN)
Bhattacharjee, G. (IN)
Das, S.C. (IN)
Majumdar, A. (IN)
Wulff, H. (DE)
Hippler, Rainer (FZU-D) ORCIDNumber of authors 7 Article number 3191 Source Title Materials. - : MDPI
Roč. 14, č. 12 (2021)Number of pages 14 s. Language eng - English Country CH - Switzerland Keywords magnetron sputtering ; Ti-Cu-N coating ; N incorporation ; X-ray photoelectron spectroscopy ; X-ray diffraction ; transmission electron microscopy Subject RIV BL - Plasma and Gas Discharge Physics OECD category Fluids and plasma physics (including surface physics) Method of publishing Open access Institutional support FZU-D - RVO:68378271 UT WOS 000667019900001 EID SCOPUS 85108311702 DOI 10.3390/ma14123191 Annotation We report the surface stoichiometry of Tix-CuyNz thin film as a function of film depth. Films are deposited by high power impulse (HiPIMS) and DC magnetron sputtering (DCMS). The composition of Ti, Cu, and N in the deposited film is investigated by X-ray photoelectron spectroscopy (XPS). At a larger depth, the relative composition of Cu and Ti in the film is increased compared to the surface. The amount of adventitious carbon which is present on the film surface strongly decreases with film depth. Deposited films also contain a significant amount of oxygen whose origin is not fully clear. Grazing incidence X-ray diffraction (GIXD) shows a Cu3N phase on the surface, while transmission electron microscopy (TEM) indicates a polycrystalline structure and the presence of a Ti3CuN phase. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2022 Electronic address http://hdl.handle.net/11104/0327392
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