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In situ optical and electrical analysis of transient plasmas generated by ns-laser ablation for Ag nanostructured film production

SYSNO ASEP	0546676
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	In situ optical and electrical analysis of transient plasmas generated by ns-laser ablation for Ag nanostructured film production
Author(s)	Irimiciuc, Stefan (FZU-D)_ORCID Chertopalov, Sergii (FZU-D)_ORCID Bulíř, Jiří (FZU-D)_{RID, ORCID, SAI} Fekete, Ladislav (FZU-D)_{RID, ORCID} Vondráček, Martin (FZU-D)_{RID, ORCID} Novotný, Michal (FZU-D)_{RID, ORCID, SAI} Craciun, V. (RO) Lančok, Ján (FZU-D)_{RID, ORCID}
Number of authors	8
Article number	110528
Source Title	Vacuum. - : Elsevier - ISSN 0042-207X Roč. 193, Nov. (2021)
Number of pages	10 s.
Language	eng - English
Country	GB - United Kingdom
Keywords	Langmuir probe ; optical emission spectroscopy ; perturbative probe ; plasma dynamics ; thickness profile ; Ag nanoparticles ; laser ablation
Subject RIV	BM - Solid Matter Physics ; Magnetism
OECD category	Condensed matter physics (including formerly solid state physics, supercond.)
R&D Projects	EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	GA20-21069S GA ČR - Czech Science Foundation (CSF)
Method of publishing	Limited access
Institutional support	FZU-D - RVO:68378271
UT WOS	000702522400003
EID SCOPUS	85112483940
DOI	10.1016/j.vacuum.2021.110528
Annotation	The continuous effort for transitioning pulsed laser deposition (PLD) technique from an experimental tool into an industrial one can be sustained by the use of complex tools for in situ real-time monitoring of the deposition process. Langmuir Probe (LP) and optical emission spectroscopy (OES) measurements were used for plasma monitoring during PLD of silver films under various Ar pressure conditions. The LP measurements revealed a multi-structured distribution of the ions, which was strongly influenced by the increase of Ar pressure.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2022
Electronic address	https://doi.org/10.1016/j.vacuum.2021.110528

Number of the records: 1