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Hydrogen-terminated diamond surface as a gas sensor: a comparative study of its sensitivities
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SYSNO ASEP 0546561 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Hydrogen-terminated diamond surface as a gas sensor: a comparative study of its sensitivities Author(s) Kočí, Michal (FZU-D) ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAI
Bouřa, A. (CZ)
Szabó, Ondrej (FZU-D) ORCID, RID
Husák, M. (CZ)Number of authors 5 Article number 5390 Source Title Sensors. - : MDPI
Roč. 21, č. 16 (2021)Number of pages 15 s. Language eng - English Country CH - Switzerland Keywords nanocrystalline diamond (NCD) ; metal oxide (MOX) ; gas detectors Subject RIV JB - Sensors, Measurment, Regulation OECD category Materials engineering R&D Projects EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LM2018110 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Open access Institutional support FZU-D - RVO:68378271 UT WOS 000689876700001 EID SCOPUS 85112096928 DOI 10.3390/s21165390 Annotation A nanocrystalline diamond (NCD) layer is used as an active (sensing) part of a conductivity gas sensor. The properties of the sensor with an NCD with H-termination (response and time characteristic of resistance change) are measured by the same equipment with a similar setup and compared with commercial sensors, a conductivity sensor with a metal oxide (MOX) active material (resistance change), and an infrared pyroelectric sensor (output voltage change) in this study. The deposited layer structure is characterized and analyzed by Scanning Electron Microscopy (SEM) and Raman spectroscopy. Electrical properties (resistance change for conductivity sensors and output voltage change for the IR pyroelectric sensor) are examined for two types of gases, oxidizing (NO2) and reducing (NH3). The parameters of the tested sensors are compared and critically evaluated. Subsequently, differences in the gas sensing principles of these conductivity sensors are described. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2022 Electronic address http://hdl.handle.net/11104/0323198
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