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Patterning of conductive nano-layers on garnet
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SYSNO ASEP 0543745 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Patterning of conductive nano-layers on garnet Author(s) Chlumská, Jana (UPT-D) RID, ORCID, SAI
Lalinský, Ondřej (UPT-D) RID, ORCID, SAI
Matějka, Milan (UPT-D) RID, ORCID, SAI
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Kolařík, Vladimír (UPT-D) RID, ORCID, SAINumber of authors 5 Source Title NANOCON 2020. 12th International Conference on Nanomaterials - Research & Application. Conference proceedings. - Ostrava : TANGER, 2021 - ISSN 2694-930X - ISBN 978-80-87294-98-7 Pages (2021), s. 221-224 Number of pages 4 s. Publication form Online - E Action International Conference NANOCON 2020 /12./ Event date 21.10.2020 - 23.10.2020 VEvent location Brno Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords Electron beam lithography ; nano-patterning ; yttrium aluminium garnet Subject RIV JJ - Other Materials OECD category Nano-processes (applications on nano-scale) R&D Projects TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Institutional support UPT-D - RVO:68081731 UT WOS 000664505500037 EID SCOPUS 85106021450 DOI 10.37904/nanocon.2020.3731 Annotation Synthetic crystalline materials of the garnet group are used as scintillators in scanning electron microscopy. If a thick conductive layer is applied on the garnet surface, slower electrons don't have enough energy to pass through this relatively thick conductive layer on the scintillator surface. Therefore, either thinner conductive layer or appropriate patterning of the thicker layer has to be used. Within this contribution we study the patterning process of such conductive nano-layer. Resolution of the patterning process is of high interest. Two approaches are compared: direct writing electron beam lithography and mask projection UV lithography. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2022 Electronic address https://www.confer.cz/nanocon/2020/3731-patterning-of-conductive-nano-layer-on-garnet
Number of the records: 1