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Beam shaping and probe characterization in the scanning electron microscope
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SYSNO ASEP 0543063 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Beam shaping and probe characterization in the scanning electron microscope Author(s) Řiháček, Tomáš (UPT-D) RID, ORCID
Horák, M. (CZ)
Schachinger, T. (AT)
Mika, Filip (UPT-D) RID, SAI, ORCID
Matějka, Milan (UPT-D) RID, ORCID, SAI
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Fořt, Tomáš (UPT-D) RID, ORCID, SAI
Radlička, Tomáš (UPT-D) RID, ORCID, SAI
Johnson, C. W. (US)
Novák, L. (CZ)
Seďa, B. (CZ)
McMorran, B.J. (US)
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDNumber of authors 13 Article number 113268 Source Title Ultramicroscopy. - : Elsevier - ISSN 0304-3991
Roč. 225, June (2021)Number of pages 9 s. Publication form Print - P Language eng - English Country NL - Netherlands Keywords Electron diffraction ; SEM ; Electron beam structuring ; Spot shape measurement ; Electron vortex beam Subject RIV BF - Elementary Particles and High Energy Physics OECD category Particles and field physics R&D Projects TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Method of publishing Open access Institutional support UPT-D - RVO:68081731 UT WOS 000649633800002 EID SCOPUS 85104406836 DOI 10.1016/j.ultramic.2021.113268 Annotation Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2022 Electronic address https://www.sciencedirect.com/science/article/pii/S0304399121000589
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