Number of the records: 1

Beam shaping and probe characterization in the scanning electron microscope

SYSNO ASEP	0543063
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Beam shaping and probe characterization in the scanning electron microscope
Author(s)	Řiháček, Tomáš (UPT-D)_{RID, ORCID} Horák, M. (CZ) Schachinger, T. (AT) Mika, Filip (UPT-D)_{RID, SAI, ORCID} Matějka, Milan (UPT-D)_{RID, ORCID, SAI} Krátký, Stanislav (UPT-D)_{RID, ORCID, SAI} Fořt, Tomáš (UPT-D)_{RID, ORCID, SAI} Radlička, Tomáš (UPT-D)_{RID, ORCID, SAI} Johnson, C. W. (US) Novák, L. (CZ) Seďa, B. (CZ) McMorran, B.J. (US) Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID}
Number of authors	13
Article number	113268
Source Title	Ultramicroscopy. - : Elsevier - ISSN 0304-3991 Roč. 225, June (2021)
Number of pages	9 s.
Publication form	Print - P
Language	eng - English
Country	NL - Netherlands
Keywords	Electron diffraction ; SEM ; Electron beam structuring ; Spot shape measurement ; Electron vortex beam
Subject RIV	BF - Elementary Particles and High Energy Physics
OECD category	Particles and field physics
R&D Projects	TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
Method of publishing	Open access
Institutional support	UPT-D - RVO:68081731
UT WOS	000649633800002
EID SCOPUS	85104406836
DOI	10.1016/j.ultramic.2021.113268
Annotation	Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2022
Electronic address	https://www.sciencedirect.com/science/article/pii/S0304399121000589

Number of the records: 1