Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography

Šarbort, Martin; Holá, Miroslava; Pavelka, Jan; Řeřucha, Šimon; Oulehla, Jindřich; Fořt, Tomáš; Lazar, Josef

doi:https://dx.doi.org/10.1364/DH.2020.HTh5H.2

Number of the records: 1

Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography

1.

SYSNO ASEP	0536751
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography
Author(s)	Šarbort, Martin (UPT-D)_{RID, ORCID, SAI} Holá, Miroslava (UPT-D)_{RID, ORCID, SAI} Pavelka, Jan (UPT-D)_{RID, SAI} Řeřucha, Šimon (UPT-D)_{RID, ORCID, SAI} Oulehla, Jindřich (UPT-D)_{RID, ORCID, SAI} Fořt, Tomáš (UPT-D)_{RID, ORCID, SAI} Lazar, Josef (UPT-D)_{RID, ORCID, SAI}
Number of authors	7
Source Title	Imaging and Applied Optics Congress. Proceedings, Computational Optical Sensing and Imaging. - Washington : OSA, 2020 - ISBN 978-1-943580-77-4
Number of pages	2 s.
Publication form	Print - P
Action	Imaging and Applied Optics Congress
Event date	22.06.2020 - 26.06.2020
VEvent location	Washington
Country	US - United States
Event type	WRD
Language	eng - English
Country	US - United States
Keywords	focus sensor ; optical metrology ; rough topography
Subject RIV	BH - Optics, Masers, Lasers
OECD category	Optics (including laser optics and quantum optics)
R&D Projects	TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	EF16_026/0008460 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UPT-D - RVO:68081731
EID SCOPUS	85102411634
DOI	10.1364/DH.2020.HTh5H.2
Annotation	We compare three focus sensors designed for the optical topography measurement of rough surface specimens with submicron accuracy. The laser beam was modulated by three specific computer-generated holograms displayed on a spatial light modulator.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2021
Electronic address	https://www.osapublishing.org/abstract.cfm?URI=DH-2020-HTh5H.2

Number of the records: 1