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Analytical formulae for trajectory displacement in electron beam and generalized slice method.
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SYSNO ASEP 0534937 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Analytical formulae for trajectory displacement in electron beam and generalized slice method. Author(s) Stopka, Jan (UPT-D) ORCID, SAI Number of authors 1 Article number 113050 Source Title Ultramicroscopy. - : Elsevier - ISSN 0304-3991
Roč. 217, OCT (2020)Number of pages 7 s. Publication form Print - P Language eng - English Country NL - Netherlands Keywords coulomb interaction ; trajectory displacement ; electron optics ; slice method ; Holtzmark regime ; pencil-beam regime Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Optics (including laser optics and quantum optics) R&D Projects TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Limited access Institutional support UPT-D - RVO:68081731 UT WOS 000588011200002 EID SCOPUS 85087419771 DOI 10.1016/j.ultramic.2020.113050 Annotation Trajectory displacement due to statistical Coulomb interactions can play a major role in determining the per-formance of a charged particle beam system. Accurate estimation of the trajectory displacement is thus an important part of the design procedure of such an optical system. Traditionally, there are three approaches to determine the trajectory displacement: Monte Carlo simulation, the slice method, where trajectory displacement
is integrated along the beam length and finally a full analytical formula describing transparently the dependence of the trajectory displacement on the parameters of the system. The latter two were developed thoroughly by Jansen and Jiang. We revise Jansen’s slice method and the derivation of the integral formulae in Holtzmark and pencil-beam regimes. We show the integral formula fails to give accurate results in case a transition between the regimes occurs and we derive a new analytical expression unifying the Holtzmark and pencil-beam regime into a single formula. Furthermore, we generalize the slice method for arbitrary beam trajectory, hugely increasing its accuracy for non-ideal systems.Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2021 Electronic address https://www.sciencedirect.com/science/article/abs/pii/S0304399120302011
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