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Microcapacitors on graphene oxide and synthetic polymers prepared by microbeam lithography
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SYSNO ASEP 0534240 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Microcapacitors on graphene oxide and synthetic polymers prepared by microbeam lithography Author(s) Malinský, Petr (UJF-V) RID, ORCID, SAI
Romanenko, Oleksandr V. (UJF-V) ORCID, SAI
Havránek, Vladimír (UJF-V) RID, SAI, ORCID
Stammers, James H. (UJF-V)
Hnatowicz, Vladimír (UJF-V) RID
Cutroneo, Mariapompea (UJF-V) ORCID, RID, SAI
Novák, Josef (UJF-V) ORCID
Slepička, P. (CZ)
Svorčík, V. (CZ)
Szokolova, K. (CZ)
Bouša, D. (CZ)
Sofer, Z. (CZ)
Macková, Anna (UJF-V) RID, ORCID, SAINumber of authors 13 Article number 146802 Source Title Applied Surface Science. - : Elsevier - ISSN 0169-4332
Roč. 528, OCT (2020)Number of pages 11 s. Publication form Print - P Language eng - English Country NL - Netherlands Keywords Polymers ; Graphene oxide ; ion-beam writing ; chemical properties ; microcapacitors Subject RIV JJ - Other Materials OECD category Coating and films R&D Projects GA19-02482S GA ČR - Czech Science Foundation (CSF) EF16_013/0001812 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Limited access Institutional support UJF-V - RVO:61389005 UT WOS 000576739600009 EID SCOPUS 85086823551 DOI 10.1016/j.apsusc.2020.146802 Annotation Carbon-ion microbeam writing was employed for the mask-less production of microscale capacitors in insulating graphene oxide (GO), polyimide (PI) and poly(methyl-methacrylate) (PMMA) foils. The substrates were irradiated by a 5 MeV C beams with micrometer-scale resolution to create conducive strips. The morphology and quality of the created microstructures and compositional changes in the host matrix under the ion microbeam irradiation were studied using scanning electron microscopy and energy-dispersive X-ray spectroscopy. The changes in the structure and elemental composition of the irradiated areas were characterised by Raman microspectroscopy, X-ray photoelectron spectroscopy, Rutherford backscattering spectroscopy and elastic recoil detection analysis. The microcapacitors with the highest capacitance (in the order of pF) were those prepared on the GO surface. On the other hand, in PI and PMMA, the same carbon-ion irradiation does not induce such a significant enhancement of electric properties and the capacity of the resulting capacitor-like structures is substantially lower. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2021 Electronic address https://doi.org/10.1016/j.apsusc.2020.146802
Number of the records: 1