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Comparison of GO and polymer microcapacitors prepared by ion beam writing

SYSNO ASEP	0525636
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Comparison of GO and polymer microcapacitors prepared by ion beam writing
Author(s)	Malinský, Petr (UJF-V)_{RID, ORCID, SAI} Romanenko, Oleksandr V. (UJF-V)_{ORCID, SAI} Havránek, Vladimír (UJF-V)_{RID, SAI, ORCID} Hnatowicz, Vladimír (UJF-V)_RID Stammers, James H. (UJF-V) Cutroneo, Mariapompea (UJF-V)_{ORCID, RID, SAI} Novák, Josef (UJF-V)_ORCID Slepička, P. (CZ) Švorčík, V. (CZ) Szokolova, K. (CZ) Bouša, D. (CZ) Sofer, Z. (CZ) Macková, Anna (UJF-V)_{RID, ORCID, SAI}
Number of authors	13
Source Title	Surface and Interface Analysis. - : Wiley - ISSN 0142-2421 Roč. 52, č. 12 (2020), s. 1171-1177
Number of pages	7 s.
Publication form	Print - P
Language	eng - English
Country	US - United States
Keywords	chemical properties ; graphene oxide ; ion beam writing ; microcapacitors ; PMMA
Subject RIV	BG - Nuclear, Atomic and Molecular Physics, Colliders
OECD category	Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)
R&D Projects	GA19-02482S GA ČR - Czech Science Foundation (CSF)
	LM2015056 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	EF16_013/0001812 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Method of publishing	Limited access
Institutional support	UJF-V - RVO:61389005
UT WOS	000544050300001
EID SCOPUS	85087206964
DOI	10.1002/sia.6851
Annotation	Carbon beam writing was employed as a method for maskless production of microscale capacitors in both insulating graphene oxide (GO) and poly(methyl methacrylate) (PMMA) matrix. The GO and PMMA foils were irradiated using a 5-MeV C(3+)beam with micrometer scale resolution. As follows, the shape of the created microstructures and compositional changes was studied using the scanning electron microscopy/energy-dispersive X-ray spectroscopy method (SEM/EDS). The structural and compositional progression was characterized by Raman spectroscopy, Rutherford backscattering spectroscopy (RBS), and elastic recoil detection analysis (ERDA) spectroscopy. The improvement of the prepared structures' electrical properties was also studied, and it can be concluded that carbon irradiation leads to the removal of oxygen and hydrogen and to growth of the carbon domains, which is connected with the conductivity increase of the irradiated parts and capacitance of the final products in the order of pF.
Workplace	Nuclear Physics Institute
Contact	Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228
Year of Publishing	2021
Electronic address	https://doi.org/10.1002/sia.6851

Number of the records: 1