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Low-energy electron microscopy of graphene outside UHV: electron-induced removal of PMMA residues used for graphene transfer

SYSNO ASEP	0525529
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Low-energy electron microscopy of graphene outside UHV: electron-induced removal of PMMA residues used for graphene transfer
Author(s)	Materna Mikmeková, Eliška (UPT-D)_{ORCID, RID, SAI} Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} Frank, Luděk (UPT-D)_{RID, SAI, ORCID} Paták, Aleš (UPT-D)_{RID, ORCID, SAI} Polčák, J. (CZ) Sluyterman, S. (NL) Lejeune, M. (FR) Konvalina, Ivo (UPT-D)_{RID, ORCID, SAI}
Number of authors	8
Article number	146873
Source Title	Journal of Electron Spectroscopy and Related Phenomena. - : Elsevier - ISSN 0368-2048 Roč. 241, MAY (2020)
Number of pages	7 s.
Publication form	Print - P
Language	eng - English
Country	NL - Netherlands
Keywords	graphene ; PMMA ; slow electron treatment ; XPS ; Raman spectroscopy
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
OECD category	Electrical and electronic engineering
R&D Projects	TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Method of publishing	Open access
Institutional support	UPT-D - RVO:68081731
UT WOS	000540723700016
EID SCOPUS	85069968563
DOI	10.1016/j.elspec.2019.06.005
Annotation	Two-dimensional materials, such as graphene, are usually prepared by chemical vapor deposition (CVD) on selected substrates, and their transfer is completed with a supporting layer, mostly polymethyl methacrylate (PMMA). Indeed, the PMMA has to be removed precisely to obtain the predicted superior properties of graphene after the transfer process. We demonstrate a new and effective technique to achieve a polymer-free CVD graphene by utilizing low-energy electron irradiation in a scanning low-energy electron microscope (SLEEM). The influence of electron-landing energy on cleaning efficiency and graphene quality was observed by SLEEM, Raman spectroscopy (the presence of disorder D peak) and XPS (the deconvolution of the C 1s peak). After removing the absorbed molecules and polymer residues from the graphene surface with slow electrons, the individual graphene layers can also be distinguished outside ultra-high vacuum conditions in both the reflected and transmitted modes of a scanning low-energy (transmission) electron microscope.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2021
Electronic address	https://www.sciencedirect.com/science/article/pii/S0368204818302068

Number of the records: 1