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The influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography
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SYSNO ASEP 0525371 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title The influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography Author(s) Romanenko, Oleksandr V. (UJF-V) ORCID, SAI
Slepička, P. (CZ)
Malinský, Petr (UJF-V) RID, ORCID, SAI
Cutroneo, Mariapompea (UJF-V) ORCID, RID, SAI
Havránek, Vladimír (UJF-V) RID, SAI, ORCID
Stammers, James H. (UJF-V)
Švorčík, V. (CZ)
Macková, Anna (UJF-V) RID, ORCID, SAINumber of authors 8 Source Title Surface and Interface Analysis. - : Wiley - ISSN 0142-2421
Roč. 52, č. 12 (2020), s. 1040-1044Number of pages 5 s. Publication form Print - P Language eng - English Country US - United States Keywords gold nanoparticles ; ion beam lithography ; microstructure ; PDMS ; shrinkage Subject RIV BG - Nuclear, Atomic and Molecular Physics, Colliders OECD category Nano-materials (production and properties) R&D Projects GA19-02482S GA ČR - Czech Science Foundation (CSF) LM2015056 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) EF16_013/0001812 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Limited access Institutional support UJF-V - RVO:61389005 UT WOS 000537352400001 EID SCOPUS 85085892917 DOI 10.1002/sia.6821 Annotation 3D microstructures in pure poly(dimethylsiloxane) (PDMS) and PDMS with embedded Au nanoparticles were prepared by ion beam lithography without any further etching. Two mega-electron volts helium and 10 MeV oxygen ions were used for ion microstructuring. Parallel lines of 1 mm in length and 10 mu m in thickness were fabricated for investigation of the effect of the nanoparticles presence in the polymer on the surface morphology of the created microstructures. The created microstructures were checked by optical microscope. Infrared (IR) spectrometry was used to study the effect of the ions type and fluence on the chemical changes of the material. Atomic force microscopy was used for the fine detail study as well as for checking the microstructure quality. Analysis revealed an increased radiation resistance of the nanocomposite compared to the pure PDMS. Shrinkage is proportional to the fluence, but the maximum value for both materials is limited by saturation. 3D microstructure in modified PDMS obtained at the same irradiation condition as pure PDMS is characterized by its smaller height. Obtaining the microstructure in nanocomposite of the same height as in pure PDMS by increasing the fluence can be impossible due to saturation of shrinkage and/or radiation-induced heating of the material. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2021 Electronic address https://doi.org/10.1002/sia.6821
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