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Statistical Coulomb interactions in multi-beam SEM
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SYSNO ASEP 0524976 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Statistical Coulomb interactions in multi-beam SEM Author(s) Stopka, Jan (UPT-D) ORCID, SAI
Kruit, P. (NL)Number of authors 2 Article number 1942021 Source Title International Journal of Modern Physics. A - ISSN 0217-751X
Roč. 34, č. 36 (2019)Number of pages 11 s. Publication form Print - P Language eng - English Country SG - Singapore Keywords coulomb interactions ; trajectory displacement ; multi-beam SEM ; electron optics ; slice method Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Optics (including laser optics and quantum optics) R&D Projects TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Limited access Institutional support UPT-D - RVO:68081731 UT WOS 000516718800022 EID SCOPUS 85076546405 DOI 10.1142/S0217751X19420211 Annotation Statistical Coulomb interactions in conventional scanning electron microscopy mostly affect the probe size via energy spread and virtual source broadening in the emitter vicinity. However, in a multi-beam probe forming system such as a multi-beam scanning electron microscopes (MBSEM), the trajectory displacement due to interactions in the whole column can give a contribution to the final probe size. For single-beam systems, this can be expressed using approximate formulae for the total trajectory displacement in a beam segment (Jansen's theory) or by integrating contributions of infinitesimally thin beam slices (the slice method). We build on Jansen's theory of statistical Coulomb interactions and develop formulae for the trajectory displacement in a multi-beam system. We also develop a more precise semi-analytical result using the slice method. We compare both approaches with a Monte Carlo simulation and show a good agreement with the results of the slice method. Finally, we discuss the implications of our results for the optical design of multi-beam SEM. In a multi-beam with probe size dominated by Coulomb interactions, an increase in the number of beamlets does not necessarily provide an increase of throughput, because the probe size is limited by the total current. Furthermore, we disprove the notion of the fewer the crossovers the less the Coulomb interactions by showing the quadratic dependence of trajectory displacement on segment length. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2021 Electronic address https://www.worldscientific.com/doi/10.1142/S0217751X19420211
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