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Determination of thickness refinement using STEM detector segments

SYSNO ASEP	0524885
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Determination of thickness refinement using STEM detector segments
Author(s)	Skoupý, Radim (UPT-D)_{RID, ORCID, SAI} Krzyžánek, Vladislav (UPT-D)_{RID, ORCID, SAI}
Number of authors	2
Source Title	10th Anniversary International Conference on Nanomaterials - Research and Application (NANOCON 2018). - Ostrava : Tanger, 2019 - ISBN 978-80-87294-89-5
Pages	s. 677-681
Number of pages	5 s.
Publication form	Print - P
Action	Anniversary International Conference on Nanomaterials - Research and Application (NANOCON) /10./
Event date	17.10.2018 - 19.10.2018
VEvent location	Brno
Country	CZ - Czech Republic
Event type	EUR
Language	eng - English
Country	CZ - Czech Republic
Keywords	electron-microscopy ; Quantitative STEM ; thickness determination ; detector segments ; Monte Carlo simulation
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
OECD category	Electrical and electronic engineering
R&D Projects	GA17-15451S GA ČR - Czech Science Foundation (CSF)
	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UPT-D - RVO:68081731
UT WOS	000513131900116
EID SCOPUS	85062973859
Annotation	Quantitative STEM imaging together with Monte Carlo simulations of electron scattering in solids can bring interesting results about properties of many thin samples. It is possible to determine thickness of a sample, to calculate mass of particles and measure mass per length/area. Appropriate calibration is one of the crucial parts of the method. Even a small error or inaccuracy in detector response to electron beam either blanked or full brings significant error into thickness determination. This problem can be overcome by parallel STEM imaging in more segments of the detector. Comparing more segments gives a possibility to use a signal from different segments for different thicknesses of a sample. Accuracy of individual parts of the detector depends on the captured signal quantity. It is desirable to use such a STEM detector segment that provides the greatest signal change to a unit of thickness. To demonstrate the usage, we used a sample of Latex nanospheres placed on thin carbon lacey film, diameter of the nanospheres was around 600 nm in order to compare the results from different detector segments. Thanks to the known thickness of the sample (calculated from its geometrical shape), it is possible to estimate the optimal acquisition settings and post processing steps with the known and the true state of the sample.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2021

Number of the records: 1