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Selective modification of electrical insulator material by ion micro beam for the fabrication of circuit elements
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SYSNO ASEP 0523923 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Selective modification of electrical insulator material by ion micro beam for the fabrication of circuit elements Author(s) Cutroneo, Mariapompea (UJF-V) ORCID, RID, SAI
Havránek, Vladimír (UJF-V) RID, SAI, ORCID
Macková, Anna (UJF-V) RID, ORCID, SAI
Malinský, Petr (UJF-V) RID, ORCID, SAI
Torrisi, Alfio (UJF-V) RID, ORCID
Silipigni, L. (IT)
Sofer, Z. (CZ)
Torrisi, L. (IT)Number of authors 8 Source Title Radiation Effects and Defects in Solids. - : Taylor & Francis - ISSN 1042-0150
Roč. 175, 3-4 (2020), s. 307-317Number of pages 11 s. Publication form Print - P Language eng - English Country GB - United Kingdom Keywords electrical insulator ; ion micro beam writing ; electrical conductivity ; Raman spectroscopy Subject RIV BG - Nuclear, Atomic and Molecular Physics, Colliders OECD category Nuclear physics R&D Projects LM2015056 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) EF16_013/0001812 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA19-02482S GA ČR - Czech Science Foundation (CSF) Method of publishing Limited access Institutional support UJF-V - RVO:61389005 UT WOS 000522130000008 EID SCOPUS 85082590761 DOI 10.1080/10420150.2019.1701462 Annotation Two well-established electrical insulators, graphene oxide and poly(methylmethacrylate) (PMMA) have been selectively exposed to controlled energy and fluence of ions. Ion micro beam has been proposed for processing of both graphene-based material and polymeric foils for tailoring of their properties. In a single step, the mask-less production of pattern on graphene-oxide and poly(methylmethacrylate) was realized at the Tandetron Laboratory of the Nuclear Physics Institute (Czech Republic) using a stream of 2.2 MeV alpha particles. Elements of a circuit were written on GO and poly(methylmethacrylate) in a controlled way using a software written in LabVIEW code. The induced deoxygenation, and dehydrogenation change the compositional, structural and electrical properties in the exposed samples. The accuracy of the method has been investigated by Rutherford backscattering spectrometry, elastic recoil detection analysis, Raman microscopy and the electrical standard two points method. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2021 Electronic address https://doi.org/10.1080/10420150.2019.1701462
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