Assessing the thickness error rate of quantitative STEM measurements

Skoupý, Radim; Krzyžánek, Vladislav

Number of the records: 1

Assessing the thickness error rate of quantitative STEM measurements

1.

SYSNO ASEP	0521571
Document Type	A - Abstract
R&D Document Type	The record was not marked in the RIV
R&D Document Type	Není vybrán druh dokumentu
Title	Assessing the thickness error rate of quantitative STEM measurements
Author(s)	Skoupý, Radim (UPT-D)_{RID, ORCID, SAI} Krzyžánek, Vladislav (UPT-D)_{RID, ORCID, SAI}
Number of authors	2
Source Title	MCM 2019. 14th Multinational Congress on Microscopy. Proceedings. - Belgrade : University of Belgrade, 2019 - ISBN 978-86-80335-11-7 S. 107-109
Number of pages	2 s.
Publication form	Print - P
Action	Multinational Congress on Microscopy /14./
Event date	15.09.2019 - 20.09.2019
VEvent location	Belgrade
Country	RS - Serbia
Event type	WRD
Language	eng - English
Country	RS - Serbia
Keywords	qSTEM ; BSE signal
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
OECD category	Nano-materials (production and properties)
R&D Projects	GA17-15451S GA ČR - Czech Science Foundation (CSF)
	FV30271 GA MPO - Ministry of Industry and Trade (MPO)
	TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
Institutional support	UPT-D - RVO:68081731
Annotation	Quantitative scanning transmission electron microscopy (qSTEM) analysis is one of the few methods which provide determination of sample thickness in an electron microscope. We focus in more detail on the accuracy of such type of thickness determination. To compare individual detector segments and their accuracy we used – analogically to our previous work with a BSE signal – a sample with a thickness known in each point – a latex nanosphere with a nominal diameter of 616 nm (S130-6, Agar Scientific, United Kingdom). We measured the diameter of 575 nm in the case of the shown particle. The accurate diameter was assessed for each particle during the image processing.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2020

Number of the records: 1