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Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target

SYSNO ASEP	0518879
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target
Author(s)	Hippler, Rainer (FZU-D)_ORCID Čada, Martin (FZU-D)_{RID, ORCID, SAI} Straňák, Vítězslav (FZU-D)_{RID, ORCID} Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI}
Number of authors	4
Article number	115020
Source Title	Plasma Sources Science & Technology. - : Institute of Physics Publishing - ISSN 0963-0252 Roč. 28, Nov (2019), s. 1-13
Number of pages	13 s.
Language	eng - English
Country	GB - United Kingdom
Keywords	magnetron sputtering ; HiPIMS ; bipolar pulse ; time-resolved optical emission spectroscopy ; ion mass spectrometry
Subject RIV	BL - Plasma and Gas Discharge Physics
OECD category	Fluids and plasma physics (including surface physics)
R&D Projects	EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	GA19-00579S GA ČR - Czech Science Foundation (CSF)
	FV30177 GA MPO - Ministry of Industry and Trade (MPO)
Method of publishing	Open access
Institutional support	FZU-D - RVO:68378271
UT WOS	000505707300001
EID SCOPUS	85079549910
DOI	10.1088/1361-6595/ab54e8
Annotation	Reactive high power impulse magnetron sputtering (HiPIMS) of a cobalt cathode in pure argon gas and with different oxygen admixtures was investigated by time-resolved optical emission spectroscopy (OES) and time-integrated energy-resolved mass spectrometry. The HiPIMS discharge was operated with a bipolar pulsed power supply capable of providing a large negative voltage with a typical pulse width of 100 μs followed by a long positive pulse with a pulse width of about 350 μs. The HiPIMS plasma in pure argon is dominated by Co+ ions. With the addition of oxygen, O+ ions become the second most prominent positive ion species. OES reveals the presence of Ar I, Co I, O I, and Ar II emission lines. The transition from an Ar+ to a Co+ ion sputtering discharge is inferred from time-resolved OES. The enhanced intensity of excited Ar+* ions is explained by simultaneous excitation and ionisation induced by energetic secondary electrons from the cathode.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2020
Electronic address	http://hdl.handle.net/11104/0303898

Number of the records: 1