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Magnesium Silicide and Germanide from Wastes as a Potential Source of CVD Precursors for Catalysts Preparation.

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    SYSNO ASEP0517231
    Document TypeC - Proceedings Paper (int. conf.)
    R&D Document TypeZáznam nebyl označen do RIV
    TitleMagnesium Silicide and Germanide from Wastes as a Potential Source of CVD Precursors for Catalysts Preparation.
    Author(s) Bumba, Jakub (UCHP-M) SAI
    Dřínek, Vladislav (UCHP-M) RID, SAI
    Kaštánek, František (UCHP-M) RID, SAI, ORCID
    Šolcová, Olga (UCHP-M) RID, ORCID, SAI
    Article numberO1.
    Source TitlePoster presentations. - Sofia : Institute of Catalysis, Bulgarian Academy of Sciences, 2019 - ISBN N
    Pagess. 1-2
    Number of pages1 s.
    Publication formOnline - E
    ActionNational Conference on Catalysis /16./
    Event date27.06.2019
    VEvent locationSofia
    CountryBG - Bulgaria
    Event typeEUR
    Languageeng - English
    CountryBG - Bulgaria
    Keywordscatalysts preparation ; wastes ; magnesium silicide and germanide
    Subject RIVCI - Industrial Chemistry, Chemical Engineering
    OBOR OECDChemical process engineering
    R&D ProjectsGA15-14228S GA ČR - Czech Science Foundation (CSF)
    TN01000048 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
    Institutional supportUCHP-M - RVO:67985858
    AnnotationChemical vapour deposition (CVD) is a technology used for forming solid films of semiconductors, metals or alloys on a substrate from precursor in gas phase. Ultrapure semiconductors mainly of silicon, germanium, and their SiGe alloys are commonly used for production of electronic components like chips, transistors, optical parts, circuits, etc. However, a top purity is required for their application in electronic industry. Silanes (SinH2n+2), germanes (GenH2n+2) and germylsilanes (SixGeyHz) belong to common CVD precursors applied for creation the thin semiconductor layers. Regrettably, the traditional refining methods for preparation of CVD precursors from waste Si, Ge, or SiGe are energetically and technologically demanding, which is significantly reflected in their price. From that reason the newly patented process, in which waste photovoltaic panels and optical lenses served as raw materials, was tested to be the lucrative source of silicon or germanium for CVD precursors.
    WorkplaceInstitute of Chemical Process Fundamentals
    ContactEva Jirsová, jirsova@icpf.cas.cz, Tel.: 220 390 227
    Year of Publishing2020
Number of the records: 1