Number of the records: 1

Automated inspection of PMMA coating on non-patterned silicon wafers

SYSNO ASEP	0511777
Document Type	A - Abstract
R&D Document Type	The record was not marked in the RIV
R&D Document Type	Není vybrán druh dokumentu
Title	Automated inspection of PMMA coating on non-patterned silicon wafers
Author(s)	Knápek, Alexandr (UPT-D)_{RID, ORCID, SAI} Drozd, Michal (UPT-D) Matějka, Milan (UPT-D)_{RID, ORCID, SAI} Chlumská, Jana (UPT-D)_{RID, ORCID, SAI} Král, Stanislav (UPT-D)_{RID, SAI} Kolařík, Vladimír (UPT-D)_{RID, ORCID, SAI}
Number of authors	6
Source Title	11th International Conference on Instrumental Methods of Analysis: Modern Trends and Applications, IMA-2019. Book of abstracts. - - : -, 2019 S. 162
Number of pages	1 s.
Publication form	Print - P
Action	International Conference on Instrumental Methods of Analysis: Modern Trends and Applications /11./
Event date	22.09.2019 - 25.09.2019
VEvent location	Ioannina
Country	GR - Greece
Event type	EUR
Language	eng - English
Keywords	dielectric surface inspection ; resist coated wafer
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
OECD category	Nano-processes (applications on nano-scale)
R&D Projects	FV10618 GA MPO - Ministry of Industry and Trade (MPO)
Institutional support	UPT-D - RVO:68081731
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2020

Number of the records: 1