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Micro ion beam used to optimize the quality of microstructures based on polydimethylsiloxane
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SYSNO ASEP 0510339 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Micro ion beam used to optimize the quality of microstructures based on polydimethylsiloxane Author(s) Cutroneo, Mariapompea (UJF-V) ORCID, RID, SAI
Havránek, Vladimír (UJF-V) RID, SAI, ORCID
Macková, Anna (UJF-V) RID, ORCID, SAI
Torrisi, Alfio (UJF-V) RID, ORCID
Flaks, Josef (UJF-V)
Slepička, P. (CZ)
Torrisi, L. (IT)Number of authors 7 Source Title Nuclear Instruments & Methods in Physics Research Section B. - : Elsevier - ISSN 0168-583X
Roč. 459, č. 11 (2019), s. 137-142Number of pages 6 s. Publication form Print - P Language eng - English Country NL - Netherlands Keywords micro ion beam ; Polydimethylsiloxane ; microstructuring ; surface characterization Subject RIV BG - Nuclear, Atomic and Molecular Physics, Colliders OECD category Materials engineering R&D Projects GA19-02482S GA ČR - Czech Science Foundation (CSF) EF16_013/0001812 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LM2015056 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Limited access Institutional support UJF-V - RVO:61389005 UT WOS 000491302700022 EID SCOPUS 85072199463 DOI 10.1016/j.nimb.2019.08.033 Annotation Ion micro beam was employed to fabricate microstructures based on poly(dimethylsiloxane) (PDMS). Carbon ions with energy of 6.0 MeV were used. The ion treatment induces modifications in PDMS surface and on the optical properties as a function of the Ion current and fluence. PDMS foils were produced from commercially available two component addition materials. The selective modifications of the polymer were studied for applications in micro-fluids, micro-optics and micro-electronics. The comparison between the unirradiated and irradiated PDMS was investigated in morphology and compactness using the atomic force microscopy. The wetting ability of the PDMS surface was also analyzed as a function of the ion microbeam irradiation. The compositional and optical changes in PDMS were monitored by Rutherford backscattering spectrometry, elastic recoil detection analysis and optical spectroscopy measurements. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2020 Electronic address https://doi.org/10.1016/j.nimb.2019.08.033
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