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Contamination Mitigation Strategy for Ultra-Low Energy Electron Microscopy and Spectroscopy

SYSNO ASEP	0510308
Document Type	A - Abstract
R&D Document Type	The record was not marked in the RIV
R&D Document Type	Není vybrán druh dokumentu
Title	Contamination Mitigation Strategy for Ultra-Low Energy Electron Microscopy and Spectroscopy
Author(s)	Materna Mikmeková, Eliška (UPT-D)_{ORCID, RID, SAI} Frank, Luděk (UPT-D)_{RID, SAI, ORCID} Konvalina, Ivo (UPT-D)_{RID, ORCID, SAI} Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} Zhang, T. (US) Asefa, T. (US)
Number of authors	6
Source Title	Microscopy and Microanalysis. - : Cambridge University Press - ISSN 1431-9276 Roč. 25, S2 (2019), s. 500-501
Number of pages	2 s.
Publication form	Print - P
Action	Microscopy & Microanalysis 2019 Meeting
Event date	04.08.2019 - 08.08.2019
VEvent location	Portland
Country	US - United States
Event type	WRD
Language	eng - English
Country	US - United States
Keywords	ultra-low energy ; spectroscopy ; contamination mitigation strategy
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
OECD category	Nano-materials (production and properties)
R&D Projects	TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	TG03010046 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
Institutional support	UPT-D - RVO:68081731
DOI	10.1017/S1431927619003234
Annotation	Perhaps the most straightforward expectation related with ultra-low energy microscopy/spectroscopy is the low penetration of electrons into the samples. In general, low energy electrons cause more intense contamination than high energy electrons, which can be explained by diminution of the interaction volume of electrons inside the samples and increased yield of secondary electrons. Naturally, for a true “surface” study, the sample has to be perfectly clean and an in-situ cleaning method should be applied on the sample.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2020

Number of the records: 1