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In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM
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SYSNO ASEP 0508751 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM Author(s) Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Mika, Filip (UPT-D) RID, SAI, ORCID
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Materna Mikmeková, Eliška (UPT-D) ORCID, RID, SAI
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDNumber of authors 5 Article number 2307 Source Title Materials. - : MDPI
Roč. 12, č. 14 (2019)Number of pages 13 s. Publication form Print - P Language eng - English Country CH - Switzerland Keywords band-pass filter of signal electrons ; SE detection ; trajectory simulations Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Electrical and electronic engineering R&D Projects TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Method of publishing Open access Institutional support UPT-D - RVO:68081731 UT WOS 000480454300095 EID SCOPUS 85070449469 DOI 10.3390/ma12142307 Annotation Scanning electron microscopes come equipped with different types of detectors for the collection of signal electrons emitted from samples. In-lens detection systems mostly consist of several auxiliary electrodes that help electrons to travel in a direction towards the detector. This paper aims to show that a through-the-lens detector in a commercial electron microscope Magellan 400 FEG can, under specific conditions, work as an energy band-pass filter of secondary electrons that are excited by the primary beam electrons. The band-pass filter properties verify extensive simulations of secondary and backscattered electrons in a precision 3D model of a microscope. A unique test sample demonstrates the effects of the band-pass filter on final image and contrast with chromium and silver stripes on a silicon substrate, manufactured by a combination of e-beam lithography, wet etching, and lift-off technique. The ray tracing of signal electrons in a detector model predicate that the through-the-lens detector works as a band-pass filter of the secondary electrons with an energy window of about 3 eV. By moving the energy window along the secondary electron energy spectrum curve of the analyzed material, we select the energy of the secondary electrons to be detected. Energy filtration brings a change in contrast in the image as well as displaying details that are not otherwise visible. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2020 Electronic address https://www.mdpi.com/1996-1944/12/14/2307/htm
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