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Great variety of man-made porous diamond structures: pulsed microwave cold plasma system with a linear antenna arrangement

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    SYSNO ASEP0507875
    Document TypeJ - Journal Article
    R&D Document TypeJournal Article
    Subsidiary JČlánek ve WOS
    TitleGreat variety of man-made porous diamond structures: pulsed microwave cold plasma system with a linear antenna arrangement
    Author(s) Varga, Marián (FZU-D) RID, ORCID
    Potocký, Štěpán (FZU-D) RID, ORCID
    Domonkos, Mária (FZU-D) RID
    Ižák, Tibor (FZU-D) RID
    Babchenko, Oleg (FZU-D) RID, ORCID
    Kromka, Alexander (FZU-D) RID, ORCID, SAI
    Number of authors6
    Source TitleACS Omega - ISSN 2470-1343
    Roč. 4, č. 5 (2019), s. 8441-8450
    Number of pages10 s.
    Languageeng - English
    CountryUS - United States
    Keywordspulsed microwave cold plasma system with a linear antenna arrangement ; porous diamond structures
    Subject RIVBM - Solid Matter Physics ; Magnetism
    OECD categoryCondensed matter physics (including formerly solid state physics, supercond.)
    R&D ProjectsNV15-33018A GA MZd - Ministry of Health (MZ)
    GF16-34856L GA ČR - Czech Science Foundation (CSF)
    EF16_019/0000760 GA MŠk - Ministry of Education, Youth and Sports (MEYS)
    Method of publishingOpen access
    Institutional supportFZU-D - RVO:68378271
    UT WOS000470094000062
    EID SCOPUS85065832519
    DOI10.1021/acsomega.9b00323
    AnnotationSynthetic diamond films are routinely grown using chemical vapor deposition (CVD) techniques. This study reviews the fabrication of various porous diamond-based structures using linear antenna microwave plasma (LAMWP) CVD, a low-cost technology for growing diamond films over a large area at low pressure and at low temperature. From a technological point of view, 2 different approaches, i.e., templated diamond growth using 3 different prestructured porous substrates and direct bottom-up growth of ultra-nanoporous diamond films, are successfully employed to form diamond-based structures with controlled porosity and an enhanced surface area. As a bottom-up strategy, the LAMWP CVD system allows diamond growth at as high as 80% CO2 in the CH4/CO2/H2 gas mixture. In summary, the low-pressure and cold plasma conditions in the LAMWP system facilitate the growth on 3D prestructured substrates of various materials that naturally form porous self-standing diamond structures.
    WorkplaceInstitute of Physics
    ContactKristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
    Year of Publishing2020
    Electronic addresshttp://hdl.handle.net/11104/0298832
Number of the records: 1