STEM detector in SEM

Konvalina, Ivo; Paták, Aleš; Materna Mikmeková, Eliška; Müllerová, Ilona

Number of the records: 1

STEM detector in SEM

1.

SYSNO ASEP	0502126
Document Type	A - Abstract
R&D Document Type	The record was not marked in the RIV
R&D Document Type	Není vybrán druh dokumentu
Title	STEM detector in SEM
Author(s)	Konvalina, Ivo (UPT-D)_{RID, ORCID, SAI} Paták, Aleš (UPT-D)_{RID, ORCID, SAI} Materna Mikmeková, Eliška (UPT-D)_{ORCID, RID, SAI} Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID}
Number of authors	4
Source Title	FEELIS-III. - Amsterdam : ARCNL, 2018 S. 55-56
Number of pages	2 s.
Publication form	Print - P
Action	LEELIS-III. Low Energy Elwctrons: Lithography, Imaging and Soft Matter
Event date	12.11.2018 - 13.11.2018
VEvent location	Amsterdam
Country	NL - Netherlands
Event type	WRD
Language	eng - English
Country	NL - Netherlands
Keywords	STEM ; SEM
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
OECD category	Electrical and electronic engineering
R&D Projects	TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UPT-D - RVO:68081731
Annotation	Nowadays, scanning electron microscopes (SEM) are commonly equipped with technique for svanning transmission electron microscopy (STEM). The segmented semiconductor STEM detector in the Magellan 400 FEG SEM microscope is used to detect transmitted electrons (TEs).
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2019

Number of the records: 1