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Improved contactless method of IR reflectance under grazing incidence for measurement of doping profiles

SYSNO ASEP	0501967
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Improved contactless method of IR reflectance under grazing incidence for measurement of doping profiles
Author(s)	Holovský, Jakub (FZU-D)_{RID, ORCID} Remeš, Zdeněk (FZU-D)_{RID, ORCID} Franta, D. (CZ) Conrad, B. (CZ) Abelová, Lucie (FZU-D) Bušek, D. (CZ) Poruba, Aleš (FZU-D)_RID
Number of authors	7
Source Title	Proceedings of 35th European Photovoltaic Solar Energy Conference and Exhibition. - Brusel : WIP, 2018 - ISBN 3-936338-50-7
Pages	s. 278-280
Number of pages	3 s.
Publication form	Online - E
Action	European Photovoltaic Solar Energy Conference and Exhibition /35./
Event date	24.09.2018 - 28.09.2018
VEvent location	Brusel
Country	BE - Belgium
Event type	WRD
Language	eng - English
Country	BE - Belgium
Keywords	diffusion ; characterisation ; free-carrier absorption ; in-Line ; IR spectroscopy
Subject RIV	BM - Solid Matter Physics ; Magnetism
OECD category	Condensed matter physics (including formerly solid state physics, supercond.)
R&D Projects	GA18-24268S GA ČR - Czech Science Foundation (CSF)
Institutional support	FZU-D - RVO:68378271
DOI	10.4229/35thEUPVSEC20182018-2AO.5.3
Annotation	We have elaborated contactless method of measurement and evaluation of doping profiles in silicon polished wafers based on infrared reflectance under high angle of incidence. We have found higher angle of incidence increases sensitivity, however approaching Brewster angle increases also experimental error, therefore 65 angle has been chosen. Moreover, to increase reproducibility we divide the measured spectra by reference spectra taken on an undoped sample, and further we rescale the spectra to fixed value in the region of 4000 cm-1–7000 cm-1. To reduce number of evaluated parameter, the carrier profile in boron-doped samples was parametrized by 3 parameters and that in phosphorous-doped samples was parametrized by 4 parameters, using additional empirically determined assumption that the first part of the profile is a constant plateau and that the following two exponential tails are joined at a value of 3x10^19 cm-3.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2019

Number of the records: 1