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Improved contactless method of IR reflectance under grazing incidence for measurement of doping profiles
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SYSNO ASEP 0501967 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Improved contactless method of IR reflectance under grazing incidence for measurement of doping profiles Author(s) Holovský, Jakub (FZU-D) RID, ORCID
Remeš, Zdeněk (FZU-D) RID, ORCID
Franta, D. (CZ)
Conrad, B. (CZ)
Abelová, Lucie (FZU-D)
Bušek, D. (CZ)
Poruba, Aleš (FZU-D) RIDNumber of authors 7 Source Title Proceedings of 35th European Photovoltaic Solar Energy Conference and Exhibition. - Brusel : WIP, 2018 - ISBN 3-936338-50-7 Pages s. 278-280 Number of pages 3 s. Publication form Online - E Action European Photovoltaic Solar Energy Conference and Exhibition /35./ Event date 24.09.2018 - 28.09.2018 VEvent location Brusel Country BE - Belgium Event type WRD Language eng - English Country BE - Belgium Keywords diffusion ; characterisation ; free-carrier absorption ; in-Line ; IR spectroscopy Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) R&D Projects GA18-24268S GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 DOI 10.4229/35thEUPVSEC20182018-2AO.5.3 Annotation We have elaborated contactless method of measurement and evaluation of doping profiles in silicon polished wafers based on infrared reflectance under high angle of incidence. We have found higher angle of incidence increases sensitivity, however approaching Brewster angle increases also experimental error, therefore 65 angle has been chosen. Moreover, to increase reproducibility we divide the measured spectra by reference spectra taken on an undoped sample, and further we rescale the spectra to fixed value in the region of 4000 cm-1–7000 cm-1. To reduce number of evaluated parameter, the carrier profile in boron-doped samples was parametrized by 3 parameters and that in phosphorous-doped samples was parametrized by 4 parameters, using additional empirically determined assumption that the first part of the profile is a constant plateau and that the following two exponential tails are joined at a value of 3x10^19 cm-3.
Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2019
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