Number of the records: 1
Carbon overlayer from hydrocarbon precursors: Electron-beam-induced deposition/removal
- 1.
SYSNO ASEP 0501304 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title Carbon overlayer from hydrocarbon precursors: Electron-beam-induced deposition/removal Author(s) Frank, Luděk (UPT-D) RID, SAI, ORCID Number of authors 1 Source Title 16th International Conference on Emerging Materials and Nanotechnology. Proceedings, S7. - London : Omics International, 2018 - ISSN 2169-0022
S. 54Number of pages 1 s. Publication form Print - P Action International Conference on Emerging Materials and Nanotechnology /16./ Event date 22.03.2018 - 23.03.2018 VEvent location London Country GB - United Kingdom Event type WRD Language eng - English Country GB - United Kingdom Keywords Electron-beam-induced ; carbon overlayer Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Nano-processes (applications on nano-scale) Institutional support UPT-D - RVO:68081731 DOI 10.4172/2169-0022-C2-093 Annotation The creation of various nanostructures on surfaces by means of the electron-beam-induced deposition of carbon from hydrocarbon precursors has proven to be a productive nanotechnological tool. On the other hand, the same phenomenon represents an unpleasant challenge when operating a scanning electron microscope with the usual standard vacuum in the specimen chamber. Even under ultrahigh vacuum conditions, a successful solution has to include in-situ cleaning of the surface under observation. Our experiments have revealed the phenomenon to be crucially dependent on the energy of incident electrons to such an extent that deposition can be converted to removal of the precursors, thereby preventing carbon coating. In addition to the electron energy, other important governing factors have been identified including the electron dose, the electron current, the electric field above the surface in question and the presence of a gas such as oxygen. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2019
Number of the records: 1