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Ion-beam lithography: A promising technique for the patterning of graphene oxide foil
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SYSNO ASEP 0495721 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Ion-beam lithography: A promising technique for the patterning of graphene oxide foil Author(s) Cutroneo, Mariapompea (UJF-V) ORCID, RID, SAI
Havránek, Vladimír (UJF-V) RID, SAI, ORCID
Macková, Anna (UJF-V) RID, ORCID, SAI
Malinský, Petr (UJF-V) RID, ORCID, SAI
Torrisi, L. (IT)
Perez-Hernandez, J. A. (ES)
Roso, L. (ES)
Luxa, J. (CZ)
Sofer, Z. (CZ)
Bottger, R. (DE)Number of authors 10 Article number 090007 Source Title AIP Conference Proceedings, 17th International Conference on Ion Sources, 2011. - Melville : AIP Publishing, 2018 - ISSN 0094-243X - ISBN 978-0-7354-1727-4 Number of pages 3 s. Publication form Print - P Action 17th International Conference on Ion Sources Event date 15.09.2017 - 20.09.2017 VEvent location Geneva Country CH - Switzerland Event type WRD Language eng - English Country US - United States Keywords graphene oxide foil ; ion beam lithography ; deoxygenation Subject RIV BG - Nuclear, Atomic and Molecular Physics, Colliders OECD category Nuclear physics R&D Projects LM2015056 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA16-05167S GA ČR - Czech Science Foundation (CSF) EF16_013/0001812 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UJF-V - RVO:61389005 UT WOS 000457042700146 EID SCOPUS 85054178862 DOI 10.1063/1.5053388 Annotation Selective deoxygenation of graphene oxide has been conducted with regard with the design and fabrication of graphene based devices. The ion beam lithography is considered to be a powerful method for patterning onto graphene oxide foil. A helium beam has been used for both direct patterning onto graphene oxide foil and simultaneous online characterisation of its structural and compositional changes. Scanning electron microscopy, energy dispersive spectroscopy and Rutherford backscattering spectrometry analyses have been accurately employed to reveal and monitor the deoxygenation of the graphene oxide foil demonstrating the reliability of the direct patterning using the ion beam lithography technique. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2019
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