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Estimation of mechanical parameters of thin films using finite element analysis

SYSNO ASEP	0494051
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Estimation of mechanical parameters of thin films using finite element analysis
Author(s)	Tinoco Navaro, Hector Andres (UFM-A)_ORCID Holzer, Jakub (UFM-A)_ORCID Pikálek, Tomáš (UPT-D)_{RID, ORCID, SAI} Buchta, Zdeněk (UPT-D)_{RID, SAI, ORCID} Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Chlupová, Alice (UFM-A)_{RID, ORCID} Kruml, Tomáš (UFM-A)_{RID, ORCID} Hutař, Pavel (UFM-A)_{RID, ORCID}
Number of authors	8
Source Title	Applied Mechanics 2018. - Plzeň : Západočská univerzita v Plzni, 2018 / Lukeš V. ; Rendl J. ; Hajžman M. ; Byrtus M. - ISBN 978-80-261-0766-8
Pages	s. 157-162
Number of pages	6 s.
Publication form	Print - P
Action	International Conference Applied Mechanics /20./
Event date	09.04.2018 - 11.04.2018
VEvent location	Myslovice
Country	CZ - Czech Republic
Event type	WRD
Language	eng - English
Country	CZ - Czech Republic
Keywords	bulge test ; thin film ; finite element analysis ; elastic properties
Subject RIV	BM - Solid Matter Physics ; Magnetism
OECD category	Condensed matter physics (including formerly solid state physics, supercond.)
Subject RIV - cooperation	Institute of Scientific Instruments - Optics, Masers, Lasers
R&D Projects	EF16_013/0001823 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UFM-A - RVO:68081723 ; UPT-D - RVO:68081731
DOI	10.31224/osf.io/3adt5
Annotation	This study shows a methodology to estimate mechanical parameters of thin films by means of a bulge test and a numerical approach. The methodology is based on the combination of finite element analysis with a classical analytical method. Finite element modelling was conducted for monolayer (Si3N4) membranes of 2x2mm with the aim to approximate both the load-deflection curves experimentally measured and the classical loaddeflection analytical model. Error functions were constructed and minimized to delimit a coupled solution space between Young’s modulus and Poison’s ratio. In a traditional bulge test analysis only one of the elastic properties can be determined due to that there is not unique solution in the estimations of these parameters. However, both elastic parameters were determined through the proposed numerical procedure which compares the deformed surfaces for a specific set of optimal elastic parameters computed. Results shows that the estimated elastic properties agree with corresponding values determined by other methods in the literature
Workplace	Institute of Physics of Materials
Contact	Yvonna Šrámková, sramkova@ipm.cz, Tel.: 532 290 485
Year of Publishing	2019

Number of the records: 1