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kW-class picosecond thin-disc prepulse laser Perla for efficient EUV generation

SYSNO ASEP	0487982
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	kW-class picosecond thin-disc prepulse laser Perla for efficient EUV generation
Author(s)	Endo, Akira (FZU-D)_RID Smrž, Martin (FZU-D)_{RID, ORCID} Mužík, Jiří (FZU-D)_ORCID Novák, Ondřej (FZU-D)_{RID, ORCID} Chyla, Michal (FZU-D)_{RID, ORCID} Mocek, Tomáš (FZU-D)_{RID, ORCID, SAI}
Number of authors	6
Article number	041011
Source Title	Journal of Micro-Nanolithography MEMS and MOEMS - ISSN 1932-5150 Roč. 16, č. 4 (2017), s. 1-6
Number of pages	6 s.
Language	eng - English
Country	US - United States
Keywords	EUV source ; laser produced plasma ; FEL ; prepulse ; thin-disc laser
Subject RIV	BH - Optics, Masers, Lasers
OECD category	Optics (including laser optics and quantum optics)
R&D Projects	LO1602 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	GA16-12960S GA ČR - Czech Science Foundation (CSF)
	LM2015086 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	FZU-D - RVO:68378271
UT WOS	000418476800011
EID SCOPUS	85042628721
DOI	10.1117/1.JMM.16.4.041011
Annotation	The technology for EUV lithography sources is maturing. LPP sources with usable power >100W have been used in high-volume manufacturing applications and 250-W sources are expected to be introduced in HVM soon. However a further increase of power and cleanness may benefit a powerful picosecond laser in the near-infrared and wavelength converted spectral region. The HiLASE Centre has been working in thin-disc laser technology and has demonstrated a 0.5-kW platform Perla-C based on a very compact Yb:YAG regenerative amplifier. 100-kHz ps operation has been achieved with a fundamental spatial mode and excellent long-term pointing and energy stability.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2018

Number of the records: 1