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A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing
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SYSNO ASEP 0486440 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing Author(s) Talbi, A. (FR)
Gimeno, L. (FR)
Gerbedoen, J.-C. (FR)
Viard, R. (FR)
Soltani, A. (FR)
Mortet, Vincent (FZU-D) RID, ORCID
Preobrazhensky, V. (FR)
Merlen, A. (FR)
Pernod, P. (FR)Number of authors 9 Article number 125029 Source Title Journal of Micromechanics and Microengineering - ISSN 0960-1317
Roč. 25, č. 2 (2015), s. 1-8Number of pages 8 s. Publication form Print - P Language eng - English Country GB - United Kingdom Keywords hot wire ; nano-crystalline diamond ; active flow control ; anemometry Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) Institutional support FZU-D - RVO:68378271 UT WOS 000366868400032 EID SCOPUS 84948675879 DOI 10.1088/0960-1317/25/12/125029 Annotation A linear array of microscale thermal anemometers has been designed, fabricated and characterized. The sensitive element consists of a self-compensated-stress multilayer (Ni/W) patterned to form a wire with length, width, and thickness close to 200 mu m, 5 mu m and 2 mu m respectively. The wire is deposited and supported by prongs made of nano-crystalline diamond (NCD) of about 2 mu m in thickness. Due to its high Young's modulus, NCD allows a very high mechanical toughness without the need for thicker support for the hot wire. Also, depending on grain size, the NCD is able to present thermal conductivity smaller than 10 W mK(-1), providing good thermal insulation from the substrate and less conductive end losses to the prongs. The sensor was characterized experimentally. Its electrical and thermal properties were obtained first in the absence of fluid flow. The results confirm the effectiveness of thermal insulation and the mechanical robustness of the structure
Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2018
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