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Surface topography measurement by frequency sweeping digital holography.
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SYSNO ASEP 0484767 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Surface topography measurement by frequency sweeping digital holography. Author(s) Lédl, Vít (UFP-V) RID
Psota, Pavel (UFP-V) RID, ORCID
Kaván, František (UFP-V)
Matoušek, Ondřej (UFP-V)
Mokrý, Pavel (UFP-V) RIDSource Title Applied Optics . - : Optical Society of America - ISSN 1559-128X
Roč. 56, č. 28 (2017), s. 7808-7814Number of pages 7 s. Publication form Print - P Language eng - English Country US - United States Keywords Wavelenght Scanning Interferometry ; Shape measurement ; Profilomerty Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Electrical and electronic engineering R&D Projects LO1206 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA16-11965S GA ČR - Czech Science Foundation (CSF) Institutional support UFP-V - RVO:61389021 UT WOS 000412053200006 EID SCOPUS 85030027833 DOI 10.1364/AO.56.007808 Annotation High-precision measurements of mechanical parts' surface topography represent an essential task in many industry sectors. Examples of such tasks are, e.g., precise alignments of opto-mechanical systems, large object deformation measurements, evaluation of object shape, and many others. Today, the standard method used for such measurements is based on use of coordinate measuring machines (CMMs). Unfortunately, CMMs have severe shortcomings: low measurement point density, long measurement time, risk of surface damage, etc. Indeed, the measurement time rapidly increases with the object complexity and with the density of measurement points. In this paper, we have developed a method for surface topography measurements called 'frequency sweeping digital holography' (FSDH). Our developed FSDH method is based on the principles of wavelength scanning interferometry. It allows surface topography measurements of objects with a diameter of several hundred of mms and a high axial accuracy reaching 10 mu m. The greatest advantage of the presented FSDH is the fact that the surface topology data are captured in a motionless manner by means of a relatively simple setup. This makes the FSDH method a suitable technique for topography measurements of objects with complex geometries made of common materials (such as metals, plastics, etc.), as well as for the characterization of complex composite structures such as acoustic metamaterials, active acoustic metasurfaces, etc. Measurement method principles, setup details, lateral resolution, and axial accuracy are discussed. Workplace Institute of Plasma Physics Contact Vladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975 Year of Publishing 2018
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