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Slumping of Si wafers at high temperature
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SYSNO ASEP 0481625 Document Type C - Proceedings Paper (int. conf.) R&D Document Type The record was not marked in the RIV Title Slumping of Si wafers at high temperature Author(s) Míka, M. (CZ)
Jankovský, O. (CZ)
Šimek, P. (CZ)
Lutyakov, O. (CZ)
Havlíková, R. (CZ)
Šofer, Z. (CZ)
Hudec, René (ASU-R) RID, ORCID
Pína, L. (CZ)
Inneman, A. (CZ)
Švéda, L. (CZ)
Maršíková, V. (CZ)Source Title Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III. - Bellingham : SPIE, 2013 / Juha L. ; Bajt S. ; London R. ; Hudec R. ; Pína L. - ISBN 9780819495792 Number of pages 7 s. Publication form Print - P Action Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III Event date 15.04.2013-18.04.2013 VEvent location Praha Country CZ - Czech Republic Event type WRD Language eng - English Country US - United States Keywords silicon ; x-ray telescope ; thermal forming Subject RIV BH - Optics, Masers, Lasers OECD category Electrical and electronic engineering Institutional support ASU-R - RVO:67985815 UT WOS 000329577700027 EID SCOPUS 84880707914 DOI 10.1117/12.2021586 Annotation Space X-ray imaging telescopes have delivered unique observations that have been significantly contributing to many important discoveries of current astrophysics. For future telescopes with a larger collecting area and a better angular resolution, the limiting factor is their X-ray reflecting mirror array. Therefore, for a successful construction of future lightweight and highly reflecting X-ray mirrors, new cost-effective technologies and progressive materials are needed. Currently, the very promising materials are silicon foils which are commercially produced on a large scale. We focused on the plastic deformation of thin monocrystalline silicon foils, which was necessary for the precise thermal forming of the foils to 3D shapes. To achieve the plastic deformation, we applied forced slumping at temperatures from 1200 to 1400 degrees C. The final shapes and the surface quality of the foils were measured using a Taylor Hobson contact profilometer and examined with an Atomic Forced Microscopy. We studied the effects of temperature, applied slumping force, heat-treatment time, crystal orientation, and furnace atmosphere on the shape and surface quality of the formed foils. Workplace Astronomical Institute Contact Radka Svašková, bibl@asu.cas.cz, Tel.: 323 620 326 Year of Publishing 2018
Number of the records: 1