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STEM modes in SEM – simulations and experiments

SYSNO ASEP	0481585
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	STEM modes in SEM – simulations and experiments
Author(s)	Konvalina, Ivo (UPT-D)_{RID, ORCID, SAI} Paták, Aleš (UPT-D)_{RID, ORCID, SAI} Mika, Filip (UPT-D)_{RID, SAI, ORCID} Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID}
Number of authors	4
Source Title	13th Multinational Congress on Microscopy: Book of Abstracts. - Zagreb : Ruder Bošković Institute, Croatian Microscopy Society, 2017 / Gajović A. ; Weber I. ; Kovačević G. ; Čadež V. ; Šegota S. ; Peharec Štefanić P. ; Vidoš A. - ISBN 978-953-7941-19-2
Pages	s. 140-141
Number of pages	2 s.
Publication form	Print - P
Action	Multinational Congress on Microscopy /13./
Event date	24.09.2017 - 29.09.2017
VEvent location	Rovinj
Country	HR - Croatia
Event type	WRD
Language	eng - English
Country	HR - Croatia
Keywords	STEM detector ; trajectory simulations ; cathode lens ; collection efficiency
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
OECD category	Electrical and electronic engineering
R&D Projects	TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
Institutional support	UPT-D - RVO:68081731
Annotation	The semiconductor STEM detector in the Magellan 400 FEG SEM microscope (www.fei.com) is used to detect transmitted electrons (TE) and allows observing samples in four imaging modes. Two modes of objective lens, namely HR (high resolution) and UHR (ultra high resolution), differ by their resolution and by the presence or absence of a magnetic field around the sample. If the deceleration mode is chosen, cathode lens (CL) field is added, and two further microscope modes can be obtained. The aim of this work is to study the trajectories of the TEs in each mode with regard to their angular and energy distribution. The HR and HR + CL mode is without magnetic field around the sample, for that reason the electrons retain their angular information. In addition, the electrostatic field between the sample and the STEM detector collimates the electrons towards the optical axis. We can detect TEs emitted at a large polar angles with respect to the optical axis. On the other hand, for UHR and UHR + CL modes, the sample is placed in a strong magnetic field. The electrons under the influence of the magnetic field have spiral trajectories and can cross the optical axis plane several times during their path to the detector, thus angular information is not simply interpretable.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2018

Number of the records: 1