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About the information depth of backscattered electron imaging
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SYSNO ASEP 0477097 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title About the information depth of backscattered electron imaging Author(s) Piňos, Jakub (UPT-D) RID, ORCID, SAI
Mikmeková, Šárka (UPT-D) RID, SAI, ORCID
Frank, Luděk (UPT-D) RID, SAI, ORCIDNumber of authors 3 Source Title Journal of Microscopy. - : Wiley - ISSN 0022-2720
Roč. 266, č. 3 (2017), s. 335-342Number of pages 8 s. Publication form Print - P Language eng - English Country GB - United Kingdom Keywords backscattered electrons ; information depth ; penetration of electrons Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Materials engineering Institutional support UPT-D - RVO:68081731 UT WOS 000401526500011 EID SCOPUS 85014109419 DOI 10.1111/jmi.12542 Annotation The information depth of imaging with backscattered electrons in the scanning electron microscope was measured directly by comparison of a planar view of a steel sample with buried precipitates with an image of a section cut through precipitates by means of a Focused Ion Beam attachment. The information depth was determined across the electron energy range of units of keV and the results were compared with information depths calculated from two published equations and simulated using widely available Monte Carlo-based software. Recommendations are given for routine estimations of BSE information depths. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2018
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