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Near infrared photoluminescence of the hydrogenated amorphous silicon thin films with in-situ embedded silicon nanoparticles
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SYSNO ASEP 0474916 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Near infrared photoluminescence of the hydrogenated amorphous silicon thin films with in-situ embedded silicon nanoparticles Author(s) Remeš, Zdeněk (FZU-D) RID, ORCID
Stuchlík, Jiří (FZU-D) RID, ORCID
Purkrt, Adam (FZU-D) RID
Ledinský, Martin (FZU-D) RID, ORCID, SAI
Kupčík, Jaroslav (UACH-T) SAI, RID, ORCIDNumber of authors 5 Source Title Ceramics - Silikáty. - : University of Chemistry and Technology Prague - ISSN 0862-5468
Roč. 61, č. 2 (2017), s. 136-140Number of pages 5 s. Language eng - English Country CZ - Czech Republic Keywords amorphous silicon ; chemical vapor deposition ; photothermal deflection spectroscopy Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) Subject RIV - cooperation Institute of Inorganic Chemistry - Inorganic Chemistry R&D Projects GC16-10429J GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 ; UACH-T - RVO:61388980 UT WOS 000400721800008 EID SCOPUS 85018484844 DOI 10.13168/cs.2017.0008 Annotation The intrinsic hydrogenated silicone layers with embedded silicon nanoparticles were grown in-situ at 250°C on glass substrates by the radio frequency plasma enhanced chemical vapor deposition (CVD) from silane highly diluted in hydrogen. The changes in the optical absorption coefficient were detected by the photothemal deflection spectroscopy (PDS). The transition from amorphous to crystalline phase for samples deposited at 5 6 % silane concentration correlates to the crystalline volume fraction about 50 % as detected by Raman spectroscopy and the high resolution transmission electron microscopy (HRTEM). The room temperature photo-luminescence increases significantly with increased crystallinity volume fraction but diminishes abruptly when crystallinity volume fraction exceeds above 80 %. The photoluminescence intensity strongly correlates with the presence of isolated silicon nanoparticles in the mixed amorphous and crystalline phase. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2018
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