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Quantitative low-energy ion beam characterization by beam profiling and imaging via scintillation screens.
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SYSNO ASEP 0469204 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Quantitative low-energy ion beam characterization by beam profiling and imaging via scintillation screens. Author(s) Germer, S. (DE)
Pietag, F. (DE)
Polák, Jaroslav (UFP-V) RID
Arnold, T. (DE)Article number 113301 Source Title Review of Scientific Instruments. - : AIP Publishing - ISSN 0034-6748
Roč. 87, č. 11 (2016)Number of pages 15 s. Publication form Print - P Action Topical Conference on High-Temperature Plasma Diagnostics/21./ Event date 05.06.2016 - 09.06.2016 VEvent location Madison Country US - United States Event type WRD Language eng - English Country US - United States Keywords Current density ; Etching ; Faraday cups ; Ion beam sources ; Cameras Subject RIV BL - Plasma and Gas Discharge Physics OECD category 2.11 Other engineering and technologies Institutional support UFP-V - RVO:61389021 UT WOS 000390242300329 EID SCOPUS 84994267529 DOI 10.1063/1.4964701 Annotation This study presents the imaging and characterization of low-current ion beams in the neutralized state monitored via single crystal YAG:Ce (Y3Al5O12) scintillators. To validate the presented beam diagnostic tool, Faraday cup measurements and test etchings were performed. Argon ions with a typical energy of 1.0 keV were emitted from an inductively coupled radio-frequency (13.56 MHz) ion beam source with total currents of some mA. Different beam properties, such as, lateral ion current density, beam divergence angle, and current density in pulsed ion beams have been studied to obtain information about the spatial beam profile and the material removal rate distribution. We observed excellent imaging properties with the scintillation screen and achieved a detailed characterization of the neutralized ion beam. A strong correlation between the scintillator light output, the ion current density, and the material removal rate could be observed. Workplace Institute of Plasma Physics Contact Vladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975 Year of Publishing 2017
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